Measurement of specimen thickness and composition in AlxGa1-xN/GaN using high-angle annular dark field images

Published 2009 View Full Article

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Title
Measurement of specimen thickness and composition in AlxGa1-xN/GaN using high-angle annular dark field images
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 109, Issue 9, Pages 1171-1182
Publisher
Elsevier BV
Online
2009-05-16
DOI
10.1016/j.ultramic.2009.05.003

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