Measurement of specimen thickness and composition in AlxGa1-xN/GaN using high-angle annular dark field images

标题
Measurement of specimen thickness and composition in AlxGa1-xN/GaN using high-angle annular dark field images
作者
关键词
-
出版物
ULTRAMICROSCOPY
Volume 109, Issue 9, Pages 1171-1182
出版商
Elsevier BV
发表日期
2009-05-16
DOI
10.1016/j.ultramic.2009.05.003

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