Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Title
Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 109, Issue 4, Pages 368-372
Publisher
Elsevier BV
Online
2009-01-23
DOI
10.1016/j.ultramic.2009.01.005

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