Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 109, Issue 4, Pages 368-372

出版商

Elsevier BV

发表日期

2009-01-23

DOI

10.1016/j.ultramic.2009.01.005

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