Characteristics of the Wear Process of Side-Wall Surfaces in Bulk-Fabricated Si-MEMS Devices in Nitrogen Gas Environment

Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls

(2010) D.H. Alsem et al.   SENSORS AND ACTUATORS A-PHYSICAL

Evolution of Wear Characteristics and Frictional Behavior in MEMS Devices

(2010) Ghatu Subhash et al.   TRIBOLOGY LETTERS

In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument

(2009) Fang Liu et al.   APPLIED PHYSICS LETTERS

Atomic force microscopy studies of chemical–mechanical processes on silicon(100) surfaces

(2008) R. Imoto et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Micron-Scale Friction and Sliding Wear of Polycrystalline Silicon Thin Structural Films in Ambient Air

(2008) D.H. Alsem et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A MEMS Device for Studying the Friction Behavior of Micromachined Sidewall Surfaces

(2008) Jie Wu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Atomistic Wear in a Single Asperity Sliding Contact

(2008) Bernd Gotsmann et al.   PHYSICAL REVIEW LETTERS