Evolution of Wear Characteristics and Frictional Behavior in MEMS Devices

Title
Evolution of Wear Characteristics and Frictional Behavior in MEMS Devices
Authors
Keywords
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Journal
TRIBOLOGY LETTERS
Volume 41, Issue 1, Pages 177-189
Publisher
Springer Nature
Online
2010-10-05
DOI
10.1007/s11249-010-9696-z

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