Synthesis of electro-active manganese oxide thin films by plasma enhanced chemical vapor deposition

Title
Synthesis of electro-active manganese oxide thin films by plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 556, Issue -, Pages 28-34
Publisher
Elsevier BV
Online
2014-01-03
DOI
10.1016/j.tsf.2013.12.054

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