Synthesis of electro-active manganese oxide thin films by plasma enhanced chemical vapor deposition

标题
Synthesis of electro-active manganese oxide thin films by plasma enhanced chemical vapor deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 556, Issue -, Pages 28-34
出版商
Elsevier BV
发表日期
2014-01-03
DOI
10.1016/j.tsf.2013.12.054

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