Ti–Al–O nanocrystal charge trapping memory cells fabricated by atomic layer deposition

Published 2014 View Full Article

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Title
Ti–Al–O nanocrystal charge trapping memory cells fabricated by atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 563, Issue -, Pages 6-9
Publisher
Elsevier BV
Online
2014-02-14
DOI
10.1016/j.tsf.2014.02.024

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