Ti–Al–O nanocrystal charge trapping memory cells fabricated by atomic layer deposition

标题
Ti–Al–O nanocrystal charge trapping memory cells fabricated by atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 563, Issue -, Pages 6-9
出版商
Elsevier BV
发表日期
2014-02-14
DOI
10.1016/j.tsf.2014.02.024

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