Sputtering deposition of P-type SnO films using robust Sn/SnO2 mixed target

Title
Sputtering deposition of P-type SnO films using robust Sn/SnO2 mixed target
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 555, Issue -, Pages 57-61
Publisher
Elsevier BV
Online
2013-06-29
DOI
10.1016/j.tsf.2013.06.059

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