Sputtering deposition of P-type SnO films using robust Sn/SnO2 mixed target

标题
Sputtering deposition of P-type SnO films using robust Sn/SnO2 mixed target
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 555, Issue -, Pages 57-61
出版商
Elsevier BV
发表日期
2013-06-29
DOI
10.1016/j.tsf.2013.06.059

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