Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance

Published 2014 View Full Article

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Title
Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 567, Issue -, Pages 20-31
Publisher
Elsevier BV
Online
2014-07-26
DOI
10.1016/j.tsf.2014.07.027

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