Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance

标题
Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 567, Issue -, Pages 20-31
出版商
Elsevier BV
发表日期
2014-07-26
DOI
10.1016/j.tsf.2014.07.027

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