Characterization and properties of NiO films produced by rf magnetron sputtering with oxygen ion source assistance

Published 2014 View Full Article

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Title
Characterization and properties of NiO films produced by rf magnetron sputtering with oxygen ion source assistance
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 572, Issue -, Pages 51-55
Publisher
Elsevier BV
Online
2014-08-28
DOI
10.1016/j.tsf.2014.07.062

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