Characterization and properties of NiO films produced by rf magnetron sputtering with oxygen ion source assistance

标题
Characterization and properties of NiO films produced by rf magnetron sputtering with oxygen ion source assistance
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 572, Issue -, Pages 51-55
出版商
Elsevier BV
发表日期
2014-08-28
DOI
10.1016/j.tsf.2014.07.062

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