Characterization of SiCN thin films: Experimental and theoretical investigations

标题
Characterization of SiCN thin films: Experimental and theoretical investigations
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 569, Issue -, Pages 57-63
出版商
Elsevier BV
发表日期
2014-08-31
DOI
10.1016/j.tsf.2014.08.027

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