Growth, dielectric properties, and memory device applications of ZrO2 thin films

Published 2013 View Full Article

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Title
Growth, dielectric properties, and memory device applications of ZrO2 thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 531, Issue -, Pages 1-20
Publisher
Elsevier BV
Online
2013-01-16
DOI
10.1016/j.tsf.2013.01.004

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