Growth, dielectric properties, and memory device applications of ZrO2 thin films

标题
Growth, dielectric properties, and memory device applications of ZrO2 thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 531, Issue -, Pages 1-20
出版商
Elsevier BV
发表日期
2013-01-16
DOI
10.1016/j.tsf.2013.01.004

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