Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

Published 2013 View Full Article

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Title
Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 549, Issue -, Pages 184-191
Publisher
Elsevier BV
Online
2013-09-17
DOI
10.1016/j.tsf.2013.09.031

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