Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

标题
Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 549, Issue -, Pages 184-191
出版商
Elsevier BV
发表日期
2013-09-17
DOI
10.1016/j.tsf.2013.09.031

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