Comparison of the electrical and optical properties of direct current and radio frequency sputtered amorphous indium gallium zinc oxide films

Title
Comparison of the electrical and optical properties of direct current and radio frequency sputtered amorphous indium gallium zinc oxide films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 527, Issue -, Pages 21-25
Publisher
Elsevier BV
Online
2012-12-22
DOI
10.1016/j.tsf.2012.12.035

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