Thermal properties of TiO2 films grown by atomic layer deposition

标题
Thermal properties of TiO2 films grown by atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 16, Pages 5442-5446
出版商
Elsevier BV
发表日期
2012-04-13
DOI
10.1016/j.tsf.2012.04.008

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