Thin gas-barrier silica layers from perhydropolysilazane obtained through low temperature curings: A comparative study

Published 2012 View Full Article

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Title
Thin gas-barrier silica layers from perhydropolysilazane obtained through low temperature curings: A comparative study
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 524, Issue -, Pages 62-66
Publisher
Elsevier BV
Online
2012-10-06
DOI
10.1016/j.tsf.2012.09.065

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