Thin gas-barrier silica layers from perhydropolysilazane obtained through low temperature curings: A comparative study

标题
Thin gas-barrier silica layers from perhydropolysilazane obtained through low temperature curings: A comparative study
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 524, Issue -, Pages 62-66
出版商
Elsevier BV
发表日期
2012-10-06
DOI
10.1016/j.tsf.2012.09.065

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