Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures

Published 2012 View Full Article

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Title
Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 20, Pages 6409-6414
Publisher
Elsevier BV
Online
2012-06-18
DOI
10.1016/j.tsf.2012.06.045

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