Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures

标题
Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 20, Pages 6409-6414
出版商
Elsevier BV
发表日期
2012-06-18
DOI
10.1016/j.tsf.2012.06.045

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