Rapid thermal annealing of sputter-deposited ZnO/ZnO:N/ZnO multilayered structures

Published 2011 View Full Article

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Title
Rapid thermal annealing of sputter-deposited ZnO/ZnO:N/ZnO multilayered structures
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 10, Pages 3729-3735
Publisher
Elsevier BV
Online
2011-12-07
DOI
10.1016/j.tsf.2011.11.058

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