Rapid thermal annealing of sputter-deposited ZnO/ZnO:N/ZnO multilayered structures

标题
Rapid thermal annealing of sputter-deposited ZnO/ZnO:N/ZnO multilayered structures
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 10, Pages 3729-3735
出版商
Elsevier BV
发表日期
2011-12-07
DOI
10.1016/j.tsf.2011.11.058

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