Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells

Title
Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 20, Pages 6887-6891
Publisher
Elsevier BV
Online
2011-05-03
DOI
10.1016/j.tsf.2011.04.078

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