Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells

标题
Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 20, Pages 6887-6891
出版商
Elsevier BV
发表日期
2011-05-03
DOI
10.1016/j.tsf.2011.04.078

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