Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit

Title
Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 19, Pages 5558-5564
Publisher
Elsevier BV
Online
2010-06-05
DOI
10.1016/j.tsf.2010.05.062

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