Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit

标题
Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 19, Pages 5558-5564
出版商
Elsevier BV
发表日期
2010-06-05
DOI
10.1016/j.tsf.2010.05.062

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