Electrical characterisation of HfYO MIM-structures deposited by ALD

标题
Electrical characterisation of HfYO MIM-structures deposited by ALD
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 16, Pages 4680-4683
出版商
Elsevier BV
发表日期
2009-12-23
DOI
10.1016/j.tsf.2009.12.058

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