Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering

Published 2010 View Full Article

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Title
Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 20, Pages 5860-5865
Publisher
Elsevier BV
Online
2010-06-02
DOI
10.1016/j.tsf.2010.05.098

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