Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering

标题
Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 20, Pages 5860-5865
出版商
Elsevier BV
发表日期
2010-06-02
DOI
10.1016/j.tsf.2010.05.098

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