Native oxide consumption during the atomic layer deposition of TiO2 films on GaAs (100) surfaces

Published 2009 View Full Article

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Title
Native oxide consumption during the atomic layer deposition of TiO2 films on GaAs (100) surfaces
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 8, Pages 2006-2009
Publisher
Elsevier BV
Online
2009-08-23
DOI
10.1016/j.tsf.2009.08.028

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