Native oxide consumption during the atomic layer deposition of TiO2 films on GaAs (100) surfaces

标题
Native oxide consumption during the atomic layer deposition of TiO2 films on GaAs (100) surfaces
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 8, Pages 2006-2009
出版商
Elsevier BV
发表日期
2009-08-23
DOI
10.1016/j.tsf.2009.08.028

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