Chemical mechanical polishing of hard disk substrate with α-alumina-g-polystyrene sulfonic acid composite abrasive

标题
Chemical mechanical polishing of hard disk substrate with α-alumina-g-polystyrene sulfonic acid composite abrasive
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 14, Pages 3792-3796
出版商
Elsevier BV
发表日期
2010-01-15
DOI
10.1016/j.tsf.2010.01.003

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