Influence of RF power on the electrical and mechanical properties of nano-structured carbon nitride thin films deposited by RF magnetron sputtering

Published 2010 View Full Article

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Title
Influence of RF power on the electrical and mechanical properties of nano-structured carbon nitride thin films deposited by RF magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 24, Pages 7240-7244
Publisher
Elsevier BV
Online
2010-05-22
DOI
10.1016/j.tsf.2010.05.002

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