Influence of RF power on the electrical and mechanical properties of nano-structured carbon nitride thin films deposited by RF magnetron sputtering

出版年份 2010 全文链接

标题

作者

关键词

出版物

Volume 518, Issue 24, Pages 7240-7244

出版商

Elsevier BV

发表日期

2010-05-22

DOI

10.1016/j.tsf.2010.05.002

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