Characterization of Arsenic segregation at Si/SiO2 interface by 3D atom probe tomography

Published 2009 View Full Article

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Title
Characterization of Arsenic segregation at Si/SiO2 interface by 3D atom probe tomography
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 9, Pages 2402-2405
Publisher
Elsevier BV
Online
2009-08-20
DOI
10.1016/j.tsf.2009.08.020

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