Characterization of Arsenic segregation at Si/SiO2 interface by 3D atom probe tomography

标题
Characterization of Arsenic segregation at Si/SiO2 interface by 3D atom probe tomography
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 9, Pages 2402-2405
出版商
Elsevier BV
发表日期
2009-08-20
DOI
10.1016/j.tsf.2009.08.020

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