Evaluation of Y2O3 gate insulators for a-IGZO thin film transistors

标题
Evaluation of Y2O3 gate insulators for a-IGZO thin film transistors
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 14, Pages 4115-4118
出版商
Elsevier BV
发表日期
2009-02-18
DOI
10.1016/j.tsf.2009.02.020

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