Properties of atomic layer deposited HfO2 thin films

Title
Properties of atomic layer deposited HfO2 thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 24, Pages 6576-6583
Publisher
Elsevier BV
Online
2009-04-20
DOI
10.1016/j.tsf.2009.04.033

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