Influence of AlN buffer layer thickness and deposition methods on GaN epitaxial growth

Published 2009 View Full Article

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Title
Influence of AlN buffer layer thickness and deposition methods on GaN epitaxial growth
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 17, Pages 5057-5060
Publisher
Elsevier BV
Online
2009-03-21
DOI
10.1016/j.tsf.2009.03.089

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