Influence of AlN buffer layer thickness and deposition methods on GaN epitaxial growth

标题
Influence of AlN buffer layer thickness and deposition methods on GaN epitaxial growth
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 17, Pages 5057-5060
出版商
Elsevier BV
发表日期
2009-03-21
DOI
10.1016/j.tsf.2009.03.089

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