Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition

标题
Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 6, Pages 1290-1296
出版商
Elsevier BV
发表日期
2007-06-08
DOI
10.1016/j.tsf.2007.05.064

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