XPS study of carbon nitride films deposited by hot filament chemical vapor deposition using carbon filament

Published 2007 View Full Article

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Title
XPS study of carbon nitride films deposited by hot filament chemical vapor deposition using carbon filament
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 5, Pages 648-651
Publisher
Elsevier BV
Online
2007-07-11
DOI
10.1016/j.tsf.2007.06.180

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