XPS study of carbon nitride films deposited by hot filament chemical vapor deposition using carbon filament

标题
XPS study of carbon nitride films deposited by hot filament chemical vapor deposition using carbon filament
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 5, Pages 648-651
出版商
Elsevier BV
发表日期
2007-07-11
DOI
10.1016/j.tsf.2007.06.180

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